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Sponsors: |
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Audience: |
Scientists and engineers from industry, government, and academia interested in semiconductor metrology for nanoelectronics. |
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Format: |
Formal invited presentation sessions and poster sessions. |
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Purpose: |
This conference represents a paradigm shift from the previous conferences in that our emphasis is on frontiers and innovation in characterization and metrology. Our goal is to bring together scientists & engineers interested in all aspects of the technology & characterization techniques for nanoelectronic materials & device research, development, manufacturing, and diagnostics. |
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Topics: |
Metrology for Nanoelectronics Materials & Devices; Ultra-Shallow Junctions; Dopant Concentrations; Alternate State Devices; Alternative Gate Dielectrics; Thin-Film Nano-Metrology; Interconnects and Barrier Layers; Etch Damage at the Nanoscale; Nanoscale Stress; Nano-Lithography and Bottlenecks; Role of Defects in Nanoelectronics; Nano-Manufacturing and Challenges; Nano-Diagnostics; In-Situ, Real-Time Nano-Control and Monitoring; Integrated Metrology; Critical Analytical Techniques; Novel Measurement Methods, Breakthroughs at the Nanoscale; Contamination, Detection, and Identification; Modeling/Simulation; Nano-Fab Metrology; MEMS/NEMS Metrology Applications; 300 mm Metrology. |
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Technical Contact: |
David G. Seiler, NIST, Gaitherburg, MD, phone: 301-975-2074, e-mail: David G. Seiler
Erik Secula, NIST, Gaitherburg, MD, phone: 301-975-2050, e-mail: Erik Secula
Lori Guariglia, NIST, Gaitherburg, MD, phone: 301-975-2054, e-mail: Lori Guariglia |
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Website: |
www.eeel.nist.gov/812/conference/ |
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Accommodations: |
A limited block of rooms is reserved at the Gaithersburg Marriott Washingtonian Center, Gaithersburg, Maryland. The room rate will be the prevailing government rate at the time of the conference (approximately $180 plus applicable taxes per night). Reservations must be made by March 8, 2007, to guarantee a room. Rooms at this special rate are available only on a first-come, first-serve basis, so make your reservation early!
The phone number for reservations is (800) 599-5111. Be sure to idenfity yourself as being with the Frontiers for Nanoelectronics Conference to ensure you receive the reduced rate. | |